Introduction to Microelectromechanical Systems (MEMS) Fabrication and Design
IDEA 216
Spring 2027
| Section:
01
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| Crosslisting:
PHYS 216 |
Microscopic devices which measure motion and pressure, perform complex computations, filter information, and interface with the physical world are everywhere around us. This course utilizes interdisciplinary ideas from physics, chemistry, electrical design, mechanics, and sustainability to explore manufacturing and design of such microelectromechanical systems (MEMS). We will explore semiconductor-based manufacturing techniques such as photolithography, thin-film deposition, and etching that are fundamental to MEMS manufacturing. We will then use a combination of analytical methods and computer-aided (CAD) simulation to explore the design methodology, principles, and functioning of MEMS, that enable sensors to interface with the physical world. The course will build tools and techniques with the final goal of producing a manufacturing ready silicon-based chip design and associated documentation, to be made in a foundry process, by the end of the semester. |
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| Credit: 1 |
Gen Ed Area Dept:
NSM IDEA |
| Course Format: Laboratory Course | Grading Mode: Graded |
| Level: UGRD |
Prerequisites: None |
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Fulfills a Requirement for: (Integrated Design, Engineering, Arts & Society Minor)(Integrated Design, Engineering, Arts & Society) |
| SECTION 01 |
Major Readings: Wesleyan RJ Julia Bookstore
: None, short readings assigned by the instructor on Moodle
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Examinations and Assignments:
: Combination of homework, in-class participation and group work, midterm individual presentation, and final group project. Homework and group work are designed to build towards the midterm presentation and final project. |
Additional Requirements and/or Comments:
: POI required. For your POI request application to be considered:
1. Submit your POI request(s) through WesPortal for IDEA216. Response Form found at the following link: https://forms.cloud.microsoft/r/vde9sgw3pZ |
| Instructor(s): Gund,Ved Times: ..T.R.. 10:20AM-11:40AM; Location: TBA |
Permission of Instructor Required
Enrollment capacity: 12 | Permission of instructor approval will be granted by the instructor during pre-registration through the Electronic Portfolio. Click "Add to My Courses" and "To request a POI electronically, click here" to submit your request. |
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